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Rotary laser thinning of silicon wafer via diffractive optical element: Effects of process parameters on surface integrity
Qingfeng Li, Yizheng Wang, Haohua Xiu, Kunyang Li, Bixuan Wang, Chenglong Hua, Yongjie Zhao, Gongyu Liu, Hao Nan Li
Research output: Journal Publication › Article › peer-review