Photothermal response in semiconducting Microcantilevers produced by Laser Excitation

Ya Qin Song, Xiao Gang Yang

Research output: Chapter in Book/Conference proceedingConference contributionpeer-review

Abstract

The elastic vibration of semiconducting microcantilever, which was excited with a frequency-modulated pump laser, was optically detected use another probe beam. The photothermal signals were measurement near the resonant frequency. The changes of vibration amplitude and phase with the change of modulation frequency were obtained for a set of different sized microcantilevers. The results showed that the experimental results had a good agreement with the theoretical ones.

Original languageEnglish
Title of host publicationMEMS and Mechanics
Pages81-84
Number of pages4
DOIs
Publication statusPublished - 2013
Externally publishedYes
Event2013 International Conference on MEMS and Mechanics, MEMSM 2013 - Wuhan, China
Duration: 15 Mar 201316 Mar 2013

Publication series

NameAdvanced Materials Research
Volume705
ISSN (Print)1022-6680

Conference

Conference2013 International Conference on MEMS and Mechanics, MEMSM 2013
Country/TerritoryChina
CityWuhan
Period15/03/1316/03/13

Keywords

  • Laser
  • Microcantilevers
  • Photothermal
  • Vibration

ASJC Scopus subject areas

  • General Engineering

Fingerprint

Dive into the research topics of 'Photothermal response in semiconducting Microcantilevers produced by Laser Excitation'. Together they form a unique fingerprint.

Cite this