Cluster ion implantation: A molecular dynamics study

Engineering & Materials Science

• Atoms 76%
• Ion implantation 100%
• Ions 45%
• Molecular dynamics 83%
• Silicon 38%

Chemical Compounds

• Cluster Ion 89%
• Collision 24%
• Ion Implantation 90%
• Molecular Cluster 16%
• Molecular Dynamics 18%
• Silicon Atom 29%
• Simulation 15%
• Surface 23%

Physics & Astronomy

• atoms 37%
• collisions 15%
• ion implantation 67%
• ions 23%
• molecular dynamics 53%
• silicon 26%
• simulation 9%
• surveillance 31%
• vibration 16%