Cluster ion implantation: A molecular dynamics study

Keyphrases

• Molecular Dynamics Study 100%
• Cluster Ions 100%
• Cluster Implantation 100%
• Silicon Surface 50%
• Multiple Simulation 50%
• Surveillance System 50%
• Molecular Dynamics 50%
• Single Atom 50%
• Silicon Atom 50%
• Channeling Effect 50%
• Silicon Clusters 50%

Physics

• Molecular Dynamics 100%
• Molecular Dynamics Study 100%
• Ion Implantation 100%