Stress in silicon interlayers at the SiO_x/Ge interface

Keyphrases

• Carrier Mobility 50%
• Density Functional Calculations 50%
• Germanium 50%
• Germanium Substrate 100%
• High Mobility 50%
• Interlayer Thickness 50%
• Oxides 100%
• Oxygen Bonds 50%
• Poor Quality 50%
• Silicon Interlayer 100%
• Silicon Layer 100%
• Silicon Oxide 50%
• SiOx 100%

Engineering

• Carrier Mobility 25%
• Energy Engineering 25%
• Ge Interface 100%
• Interlayer 100%
• Poor Quality 25%
• Silicon Layer 50%
• Silicon Oxide 25%

Material Science

• Carrier Mobility 12%
• Density 12%
• Germanium 37%
• Oxide Compound 37%
• Silicon 100%