Review: Fine embossing of novel glasses for photonic integrated circuits

A. B. Seddon; D. Furniss; W. J. Pan; P. Sewell; A. Loni; Y. Zhang; T. M. Benson

doi:10.1117/12.760888

Review: Fine embossing of novel glasses for photonic integrated circuits

A. B. Seddon, D. Furniss, W. J. Pan, P. Sewell, A. Loni, Y. Zhang, T. M. Benson

Research output: Chapter in Book/Conference proceeding › Conference contribution › peer-review

1 Citation (Scopus)

Abstract

Hot embossing of novel inorganic-compound glasses is a new fabrication technology for guided wave devices and circuitry. A patterned mould is pressed into the glass above its glass transition temperature (T_g) and replicated; cooling below T_g freezes-in the required pattern. The state-of-the-art is reviewed. Better than 0.1 μm -scale replication is shown for chalcogenide glasses and fabrication of a hot embossed monomode waveguide demonstrated.

Original language	English
Title of host publication	Optical Components and Materials V
DOIs	https://doi.org/10.1117/12.760888
Publication status	Published - 2008
Externally published	Yes
Event	Optical Components and Materials V - San Jose, CA, United States Duration: 21 Jan 2008 → 23 Jan 2008

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	6890
ISSN (Print)	0277-786X

Conference

Conference	Optical Components and Materials V
Country/Territory	United States
City	San Jose, CA
Period	21/01/08 → 23/01/08

Keywords

Chalcogenide glasses
Embossing
Monomode waveguide
Moulding
Planar waveguides
Rib waveguide

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.760888

Cite this

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title = "Review: Fine embossing of novel glasses for photonic integrated circuits",

abstract = "Hot embossing of novel inorganic-compound glasses is a new fabrication technology for guided wave devices and circuitry. A patterned mould is pressed into the glass above its glass transition temperature (Tg) and replicated; cooling below Tg freezes-in the required pattern. The state-of-the-art is reviewed. Better than 0.1 μm -scale replication is shown for chalcogenide glasses and fabrication of a hot embossed monomode waveguide demonstrated.",

keywords = "Chalcogenide glasses, Embossing, Monomode waveguide, Moulding, Planar waveguides, Rib waveguide",

author = "Seddon, {A. B.} and D. Furniss and Pan, {W. J.} and P. Sewell and A. Loni and Y. Zhang and Benson, {T. M.}",

year = "2008",

doi = "10.1117/12.760888",

language = "English",

isbn = "9780819470652",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

booktitle = "Optical Components and Materials V",

note = "Optical Components and Materials V ; Conference date: 21-01-2008 Through 23-01-2008",

}

Seddon, AB, Furniss, D, Pan, WJ, Sewell, P, Loni, A, Zhang, Y & Benson, TM 2008, Review: Fine embossing of novel glasses for photonic integrated circuits. in Optical Components and Materials V., 689007, Proceedings of SPIE - The International Society for Optical Engineering, vol. 6890, Optical Components and Materials V, San Jose, CA, United States, 21/01/08. https://doi.org/10.1117/12.760888

TY - GEN

T1 - Review

T2 - Optical Components and Materials V

AU - Seddon, A. B.

AU - Furniss, D.

AU - Pan, W. J.

AU - Sewell, P.

AU - Loni, A.

AU - Zhang, Y.

AU - Benson, T. M.

PY - 2008

Y1 - 2008

N2 - Hot embossing of novel inorganic-compound glasses is a new fabrication technology for guided wave devices and circuitry. A patterned mould is pressed into the glass above its glass transition temperature (Tg) and replicated; cooling below Tg freezes-in the required pattern. The state-of-the-art is reviewed. Better than 0.1 μm -scale replication is shown for chalcogenide glasses and fabrication of a hot embossed monomode waveguide demonstrated.

AB - Hot embossing of novel inorganic-compound glasses is a new fabrication technology for guided wave devices and circuitry. A patterned mould is pressed into the glass above its glass transition temperature (Tg) and replicated; cooling below Tg freezes-in the required pattern. The state-of-the-art is reviewed. Better than 0.1 μm -scale replication is shown for chalcogenide glasses and fabrication of a hot embossed monomode waveguide demonstrated.

KW - Chalcogenide glasses

KW - Embossing

KW - Monomode waveguide

KW - Moulding

KW - Planar waveguides

KW - Rib waveguide

UR - http://www.scopus.com/inward/record.url?scp=41149166616&partnerID=8YFLogxK

U2 - 10.1117/12.760888

DO - 10.1117/12.760888

M3 - Conference contribution

AN - SCOPUS:41149166616

SN - 9780819470652

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Optical Components and Materials V

Y2 - 21 January 2008 through 23 January 2008

ER -

Review: Fine embossing of novel glasses for photonic integrated circuits

Abstract

Publication series

Conference

Keywords

ASJC Scopus subject areas

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