Theoretical and experimental investigations on conformal polishing of microstructured surfaces

Microstructured surfaces play a pivotal role in various fields, notably in lighting, diffuser devices, and imaging systems. The performance of these components is intricately related to the accuracy of their shapes and the quality of their surfaces. Although current precision machining technologies are capable of achieving conformal shapes, the post-machining surface quality often remains uncertain. To appropriately address this challenge, this paper introduces a novel conformal polishing methodology, specifically designed to enhance the surface quality of microstructured surfaces while maintaining their shape accuracy. As part of the investigations, specialized tools, namely the damping tool and profiling damping tool, are methodically developed for polishing rectangular and cylindrical surfaces. A shape evolution model is established based on the simulation of individual microstructures, incorporating the concept of finite-slip on the microstructured surface. The findings reveal that principal stresses and velocities experience abrupt variations at the convex and concave corners of rectangular surfaces as well as at the ends of cylindrical surfaces. The numerically predicted surface shape errors after polishing demonstrate reasonably good agreement with experimental results such that their discrepancies are less than 1 μm. Additionally, this method is able to successfully eradicate pre-machining imperfections such as residual tool marks and burrs on the microstructured surfaces. The arithmetic roughness (Ra) of the rectangular surface is measured to be an impressively low 0.4 nm, whereas the cylindrical surface exhibits Ra = 6.2 nm. These results clearly emphasize the effectiveness of the conformal polishing method in achieving high-quality surface finishes.