Multi-layer surface profiling using gated wavefront sensing

Xin Wang; Nur Dalilla Nordin; Eddy Chow Mun Tik; Chingseong Tan; Kuew Wai Chew; Carmen Menoni

doi:10.1117/12.2176174

Multi-layer surface profiling using gated wavefront sensing

Xin Wang, Nur Dalilla Nordin, Eddy Chow Mun Tik, Chingseong Tan, Kuew Wai Chew, Carmen Menoni

Research output: Chapter in Book/Conference proceeding › Conference contribution › peer-review

Abstract

Recently, multi-layer surface profiling and inspection has been considered an emerging topic that can be used to solve various manufacturing inspection problems, such as graded index lenses, TSV (Thru-Silicon Via), and optical coating. In our study, we proposed a gated wavefront sensing approach to estimate the multi-layer surface profile. In this paper, we set up an experimental platform to validate our theoretical models and methods. Our test bed consists of pulse laser, collimator, prism, well-defined focusing lens, testing specimen, and gated wavefront sensing assembly (e.g., lenslet and gated camera). Typical wavefront measurement steps are carried out for the gated system, except the reflectance is timed against its time of flight as well as its intensity profile. By synchronizing the laser pulses to the camera gate time, it is possible to discriminate a multi-layer wavefront from its neighbouring discrete layer reflections.

Original language	English
Title of host publication	Optics and Measurement Conference 2014
Editors	Tomas Vit, Jana Kovacicinova
Publisher	SPIE
ISBN (Electronic)	9781628415575
DOIs	https://doi.org/10.1117/12.2176174
Publication status	Published - 2015
Externally published	Yes
Event	Optics and Measurement Conference 2014 - Liberec, Czech Republic Duration: 7 Oct 2014 → 10 Oct 2014

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	9442
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	Optics and Measurement Conference 2014
Country/Territory	Czech Republic
City	Liberec
Period	7/10/14 → 10/10/14

Keywords

gated wavefront sensing
Multi-layer surface profiling

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.2176174

Cite this

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title = "Multi-layer surface profiling using gated wavefront sensing",

abstract = "Recently, multi-layer surface profiling and inspection has been considered an emerging topic that can be used to solve various manufacturing inspection problems, such as graded index lenses, TSV (Thru-Silicon Via), and optical coating. In our study, we proposed a gated wavefront sensing approach to estimate the multi-layer surface profile. In this paper, we set up an experimental platform to validate our theoretical models and methods. Our test bed consists of pulse laser, collimator, prism, well-defined focusing lens, testing specimen, and gated wavefront sensing assembly (e.g., lenslet and gated camera). Typical wavefront measurement steps are carried out for the gated system, except the reflectance is timed against its time of flight as well as its intensity profile. By synchronizing the laser pulses to the camera gate time, it is possible to discriminate a multi-layer wavefront from its neighbouring discrete layer reflections.",

keywords = "gated wavefront sensing, Multi-layer surface profiling",

author = "Xin Wang and Nordin, {Nur Dalilla} and Tik, {Eddy Chow Mun} and Chingseong Tan and Chew, {Kuew Wai} and Carmen Menoni",

note = "Publisher Copyright: {\textcopyright} 2015 SPIE.; Optics and Measurement Conference 2014 ; Conference date: 07-10-2014 Through 10-10-2014",

year = "2015",

doi = "10.1117/12.2176174",

language = "English",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

publisher = "SPIE",

editor = "Tomas Vit and Jana Kovacicinova",

booktitle = "Optics and Measurement Conference 2014",

address = "United States",

}

Wang, X, Nordin, ND, Tik, ECM, Tan, C, Chew, KW & Menoni, C 2015, Multi-layer surface profiling using gated wavefront sensing. in T Vit & J Kovacicinova (eds), Optics and Measurement Conference 2014., 94421K, Proceedings of SPIE - The International Society for Optical Engineering, vol. 9442, SPIE, Optics and Measurement Conference 2014, Liberec, Czech Republic, 7/10/14. https://doi.org/10.1117/12.2176174

Multi-layer surface profiling using gated wavefront sensing. / Wang, Xin; Nordin, Nur Dalilla; Tik, Eddy Chow Mun et al.
Optics and Measurement Conference 2014. ed. / Tomas Vit; Jana Kovacicinova. SPIE, 2015. 94421K (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9442).

Research output: Chapter in Book/Conference proceeding › Conference contribution › peer-review

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T1 - Multi-layer surface profiling using gated wavefront sensing

AU - Wang, Xin

AU - Nordin, Nur Dalilla

AU - Tik, Eddy Chow Mun

AU - Tan, Chingseong

AU - Chew, Kuew Wai

AU - Menoni, Carmen

PY - 2015

Y1 - 2015

N2 - Recently, multi-layer surface profiling and inspection has been considered an emerging topic that can be used to solve various manufacturing inspection problems, such as graded index lenses, TSV (Thru-Silicon Via), and optical coating. In our study, we proposed a gated wavefront sensing approach to estimate the multi-layer surface profile. In this paper, we set up an experimental platform to validate our theoretical models and methods. Our test bed consists of pulse laser, collimator, prism, well-defined focusing lens, testing specimen, and gated wavefront sensing assembly (e.g., lenslet and gated camera). Typical wavefront measurement steps are carried out for the gated system, except the reflectance is timed against its time of flight as well as its intensity profile. By synchronizing the laser pulses to the camera gate time, it is possible to discriminate a multi-layer wavefront from its neighbouring discrete layer reflections.

AB - Recently, multi-layer surface profiling and inspection has been considered an emerging topic that can be used to solve various manufacturing inspection problems, such as graded index lenses, TSV (Thru-Silicon Via), and optical coating. In our study, we proposed a gated wavefront sensing approach to estimate the multi-layer surface profile. In this paper, we set up an experimental platform to validate our theoretical models and methods. Our test bed consists of pulse laser, collimator, prism, well-defined focusing lens, testing specimen, and gated wavefront sensing assembly (e.g., lenslet and gated camera). Typical wavefront measurement steps are carried out for the gated system, except the reflectance is timed against its time of flight as well as its intensity profile. By synchronizing the laser pulses to the camera gate time, it is possible to discriminate a multi-layer wavefront from its neighbouring discrete layer reflections.

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Multi-layer surface profiling using gated wavefront sensing

Abstract

Publication series

Conference

Keywords

ASJC Scopus subject areas

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