Gated imaging for multi-layer wave-front sensing and surface reconstruction

Ching Seong Tan; Xin Wang; Wee Keong Lim; Yong Han Ng; Chai Tong Yuen

doi:10.1117/12.2020845

Gated imaging for multi-layer wave-front sensing and surface reconstruction

Ching Seong Tan, Xin Wang, Wee Keong Lim, Yong Han Ng, Chai Tong Yuen

Research output: Chapter in Book/Conference proceeding › Conference contribution › peer-review

Abstract

Recently, semiconductor manufacturers have been striving for high speed, large scale multi-layer wafer surface measurement. In this paper, we propose a novel technique in multi-layer wave-front sensing. The measurement uses a gated camera in pico second shutter that can be synchronized to a pico second laser pulse, up to μm accuracy. Subsequently, we propose a compensation technique using time-of-flight wave-front sensing to reconstruct the multilayer surfaces using our proposed gated imaging technique.

Original language	English
Title of host publication	International Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013
DOIs	https://doi.org/10.1117/12.2020845
Publication status	Published - 2013
Externally published	Yes
Event	International Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013 - Singapore, Singapore Duration: 9 Apr 2013 → 11 Apr 2013

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	8769
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	International Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013
Country/Territory	Singapore
City	Singapore
Period	9/04/13 → 11/04/13

Keywords

Gated imaging
Surface reconstruction
Wavefront sensing

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.2020845

Cite this

Tan, C. S., Wang, X., Lim, W. K., Ng, Y. H., & Yuen, C. T. (2013). Gated imaging for multi-layer wave-front sensing and surface reconstruction. In International Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013 Article 87690B (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8769). https://doi.org/10.1117/12.2020845

@inproceedings{86b13e70a4f44188a0c8b603c6cfb38f,

title = "Gated imaging for multi-layer wave-front sensing and surface reconstruction",

abstract = "Recently, semiconductor manufacturers have been striving for high speed, large scale multi-layer wafer surface measurement. In this paper, we propose a novel technique in multi-layer wave-front sensing. The measurement uses a gated camera in pico second shutter that can be synchronized to a pico second laser pulse, up to μm accuracy. Subsequently, we propose a compensation technique using time-of-flight wave-front sensing to reconstruct the multilayer surfaces using our proposed gated imaging technique.",

keywords = "Gated imaging, Surface reconstruction, Wavefront sensing",

author = "Tan, {Ching Seong} and Xin Wang and Lim, {Wee Keong} and Ng, {Yong Han} and Yuen, {Chai Tong}",

year = "2013",

doi = "10.1117/12.2020845",

language = "English",

isbn = "9780819495679",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

booktitle = "International Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013",

note = "International Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013 ; Conference date: 09-04-2013 Through 11-04-2013",

}

Tan, CS, Wang, X, Lim, WK, Ng, YH & Yuen, CT 2013, Gated imaging for multi-layer wave-front sensing and surface reconstruction. in International Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013., 87690B, Proceedings of SPIE - The International Society for Optical Engineering, vol. 8769, International Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013, Singapore, Singapore, 9/04/13. https://doi.org/10.1117/12.2020845

Gated imaging for multi-layer wave-front sensing and surface reconstruction. / Tan, Ching Seong; Wang, Xin; Lim, Wee Keong et al.
International Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013. 2013. 87690B (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8769).

Research output: Chapter in Book/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Gated imaging for multi-layer wave-front sensing and surface reconstruction

AU - Tan, Ching Seong

AU - Wang, Xin

AU - Lim, Wee Keong

AU - Ng, Yong Han

AU - Yuen, Chai Tong

PY - 2013

Y1 - 2013

N2 - Recently, semiconductor manufacturers have been striving for high speed, large scale multi-layer wafer surface measurement. In this paper, we propose a novel technique in multi-layer wave-front sensing. The measurement uses a gated camera in pico second shutter that can be synchronized to a pico second laser pulse, up to μm accuracy. Subsequently, we propose a compensation technique using time-of-flight wave-front sensing to reconstruct the multilayer surfaces using our proposed gated imaging technique.

AB - Recently, semiconductor manufacturers have been striving for high speed, large scale multi-layer wafer surface measurement. In this paper, we propose a novel technique in multi-layer wave-front sensing. The measurement uses a gated camera in pico second shutter that can be synchronized to a pico second laser pulse, up to μm accuracy. Subsequently, we propose a compensation technique using time-of-flight wave-front sensing to reconstruct the multilayer surfaces using our proposed gated imaging technique.

KW - Gated imaging

KW - Surface reconstruction

KW - Wavefront sensing

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U2 - 10.1117/12.2020845

DO - 10.1117/12.2020845

M3 - Conference contribution

AN - SCOPUS:84881329325

SN - 9780819495679

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - International Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013

T2 - International Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013

Y2 - 9 April 2013 through 11 April 2013

ER -

Gated imaging for multi-layer wave-front sensing and surface reconstruction

Abstract

Publication series

Conference

Keywords

ASJC Scopus subject areas

Access to Document

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