Fine embossing of chalcogenide glasses - a new fabrication route for photonic integrated circuits

For the first time embossing of ribs, from 1 to 10 μm wide and ∼10 mm long, has been carried out in chalcogenide glass layers sputtered onto semiconductor wafer substrates, with potential to act as monomode waveguides; these features have been similarly embossed in the surface of bulk chalcogenide glasses. The embossing shows very good replication of the GaAs mould patterning to 1 μm definition, with evidence also for sub-micron replication. For the embossing, thin coatings of the chalcogenide glasses were sputtered onto wafer substrates as follows: (i) a 6 μm layer of Ge₁₇As₁₈Se₆₅ (at.%) onto porous Si-on-Si wafer substrates and (ii) a 4 μm layer of Ge₁₅As₁₅Se₁₇Te₅₃ onto uncoated GaAs substrates. The Ge₁₇As₁₈Se₆₅ sputtered glass layer on porous Si-on-Si was demonstrated to slab waveguide at 1.55 μm wavelength; it was designed to achieve monomode waveguiding at 1.55 μm after embossing, for the 5 μm wide rib. The series of ribs, 1-10 μm wide, were successfully embossed in the Ge₁₇As₁₈Se₆₅ glass sputtered layer on porous Si-on-Si, but cracking of the glass layer occurred during the embossing process. Successful embossing of ribs without the glass layer cracking was achieved for the Ge₁₅As₁₅Se₁₇Te₅₃ sputtered glass layer on uncoated GaAs. Due to its relative simplicity, it is likely that hot embossing of this type of glass-based matrix offers an extremely promising route for producing high-resolution, guided-wave optical components and circuitry at low-cost, high-volume, and for a wide wavelength range.