Atomic scale model interfaces between high- k hafnium silicates and silicon

Engineering & Materials Science

• Hafnium 100%
• Silicates 72%
• Silicon 49%
• Density functional theory 47%
• Gate dielectrics 44%
• Defects 43%
• Oxide semiconductors 37%
• Molecular dynamics 35%
• Solubility 34%
• Field effect transistors 33%
• Thermodynamic stability 32%
• Permittivity 31%
• Oxidation 27%
• Oxygen 25%
• Substrates 22%
• Metals 20%
• Geometry 19%

Physics & Astronomy

• hafnium 78%
• scale models 72%
• silicates 61%
• silicon 33%
• defects 14%
• solubility 11%
• CMOS 11%
• thermal stability 11%
• field effect transistors 9%
• density functional theory 9%
• oxidation 9%
• molecular dynamics 9%
• permittivity 8%
• optimization 8%
• oxygen 7%
• geometry 7%

Chemical Compounds

• Hafnium Atom 75%
• Permittivity 35%
• Molecular Geometry 34%
• Field Effect 31%
• Dielectric Material 27%
• Molecular Dynamics 23%
• Thermal Stability 20%
• Solubility 19%
• Density Functional Theory 19%
• Oxidation Reaction 14%
• Surface 10%