Project Details
| Status | Finished |
|---|---|
| Effective start/end date | 1/01/17 → 31/12/18 |
Funding
- National Natural Science Foundation of China (NSFC): CN¥399,960.00
Four-dimensional Dopant Profiling for Rapid Prototyping and Fabrication of Nanoscale Semiconductor Devices Using Novel Combined SEM / FIB Techniques
- Chee, Kuan (PI)