Study on photothermal vibration response of gold coating semiconducting microcantilevers

Yaqin Song, Xiaogang Yang, Tianbao Dong

Research output: Journal PublicationArticlepeer-review

1 Citation (Scopus)


The elastic vibration response of coat layered semiconducting microcantilevers, which were excited with a frequency-modulated pump laser and detected with another probe beam, was studied experimentally and theoretically in this paper. The photothermal vibration frequency spectra were measured and analyzed for a set of microcantilevers with different coating thickness at the region near the first resonant frequency. Also the vibrations of microcantilevers were calculated using coupled carrier dispersion, thermal wave and elastic wave equations. The results showed that the experimental results had a good agreement with the theoretical ones.

Original languageEnglish
Pages (from-to)391-397
Number of pages7
JournalInternational Journal of Applied Electromagnetics and Mechanics
Issue number2
Publication statusPublished - 2019
Externally publishedYes


  • Coating
  • Microcantilevers
  • Photothermal
  • Vibration

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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