Abstract
The elastic vibration response of coat layered semiconducting microcantilevers, which were excited with a frequency-modulated pump laser and detected with another probe beam, was studied experimentally and theoretically in this paper. The photothermal vibration frequency spectra were measured and analyzed for a set of microcantilevers with different coating thickness at the region near the first resonant frequency. Also the vibrations of microcantilevers were calculated using coupled carrier dispersion, thermal wave and elastic wave equations. The results showed that the experimental results had a good agreement with the theoretical ones.
| Original language | English |
|---|---|
| Pages (from-to) | 391-397 |
| Number of pages | 7 |
| Journal | International Journal of Applied Electromagnetics and Mechanics |
| Volume | 59 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 2019 |
| Externally published | Yes |
Keywords
- Coating
- Microcantilevers
- Photothermal
- Vibration
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering
- Electrical and Electronic Engineering