SiAlON composite films with strengthened chemical intermixing for wide infrared absorption band

Yuxin Jiang, Zhilin Chen, Hui Xiong, Qiuju Zhang, Hao Chen, Junhua Gao, Hongtao Cao

Research output: Journal PublicationArticlepeer-review


Broadband infrared absorbers have been intensively developed in recent decades due to their wide range of applications. Current infrared absorbers usually adapt complicated photonic designs to meet increasing demands, since natural infrared material (e.g., dielectrics, polymers, and metals) can hardly realize broadband and spectrally selective absorption simultaneously. In this paper, a novel infrared absorbing composite SiAlON is proposed and successfully fabricated by co-sputtering Si3N4 and AlN. Its wide-band absorption characteristics across through 8 to 16 μm can be tuned simply via adjusting its deposition conditions. The corresponding optical and composition analyses confirm that the broadband features with spectral selectivity are attributed to chemical composition control and the chemical bonding state tunability. This work extends the bandwidth and improves the absorbing flexibility of single material, making a step forward to develop broadband infrared absorbers with simpler structure.

Original languageEnglish
Article number158341
JournalApplied Surface Science
Publication statusPublished - 15 Dec 2023


  • Broadband infrared absorption
  • Chemical bonding
  • Magnetron co-sputtering
  • Optical properties tuning
  • SiAlON composite

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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