Inkjet printing of polyimide insulators for the 3D printing of dielectric materials for microelectronic applications

Fan Zhang, Christopher Tuck, Richard Hague, Yinfeng He, Ehab Saleh, You Li, Craig Sturgess, Ricky Wildman

Research output: Journal PublicationArticlepeer-review

63 Citations (Scopus)

Abstract

In this article, we report the first continuous fabrication of inkjet-printed polyimide films, which were used as insulating layers for the production of capacitors. The polyimide ink was prepared from its precursor poly(amic) acid, and directly printed on to a hot substrate (at around 160°C) to initialize a rapid thermal imidization. By carefully adjusting the substrate temperature, droplet spacing, droplet velocity, and other printing parameters, polyimide films with good surface morphologies were printed between two conducting layers to fabricate capacitors. In this work, the highest capacitance value, 2.82 ± 0.64 nF, was achieved by capacitors (10 mm × 10 mm) with polyimide insulating layers thinner than 1 μm, suggesting that the polyimide inkjet printing approach is an efficient way for producing dielectric components of microelectronic devices.

Original languageEnglish
Article number43361
JournalJournal of Applied Polymer Science
Volume133
Issue number18
DOIs
Publication statusPublished - 10 May 2016
Externally publishedYes

Keywords

  • dielectric properties
  • manufacturing
  • polyimides
  • rheology

ASJC Scopus subject areas

  • Chemistry (all)
  • Surfaces, Coatings and Films
  • Polymers and Plastics
  • Materials Chemistry

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