Coupling effects of the number of pulses, pulse repetition rate and fluence during laser PMMA ablation

Z. Q. Liu, Y. Feng, X. S. Yi

Research output: Journal PublicationArticlepeer-review

31 Citations (Scopus)

Abstract

Poly(methyl methacrylate) (PMMA) was ablated using a 248-nm long-pulsed KrF excimer laser operating at a pulse repetition rate (PRR) of 2 and 10 Hz, and fluence varying from 0.4 to 2 J/cm2. The coupling effects of multiple shots, PRR, and fluence are found and discussed on the etching depth data and topography of PMMA. An increase in either PRR, or fluence or the number of pulses can accelerate the etching efficiency in terms of ablation rate, as a result of strengthened thermal effects. Quality of the craters such as roughness, porosity and contamination is sensitively dependent on the specific laser operating conditions. Basically, increasing the PRR and the number of pulses gives rise to a crater with smoother and less porous bottom.

Original languageEnglish
Pages (from-to)303-308
Number of pages6
JournalApplied Surface Science
Volume165
Issue number4
DOIs
Publication statusPublished - 2 Oct 2000
Externally publishedYes

ASJC Scopus subject areas

  • Chemistry (all)
  • Condensed Matter Physics
  • Physics and Astronomy (all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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