Vibration Suppression in Compliant Micro-nano Positioning Systems Through Disturbance Observation

This work proposes an active control methodology for achieving effective disturbance observation and vibration suppression in compliant micro-nano positioning stage system. It addresses the control challenges associated with using compliant parallel mechanisms (CPMs) in systems where vibration and external disturbances significantly impact performance. The proposed control method employs a predefined-time extended state observer (PTESO) combined with linear sliding mode control (SMC). By relying solely on position signals, the control system achieves faster and more accurate disturbance estimation and compensation, thereby improving overall robustness and dynamic performance in vibration suppression. The effectiveness of the proposed scheme is validated through experiments on vibration control under various external disturbances, demonstrating significant improvements in control performance compared to traditional ESO-based control schemes. Additionally, the proposed control methodology effectively mitigates time delays, enabling high-precision real-time disturbance observation and vibration suppression at the micro-nano level. Although this method involves relatively more parameters, its structural simplicity allows for rapid application in other control scenarios requiring disturbance rejection and system state observation, showcasing promising application prospects.