Keyphrases
Si(111)
100%
Hafnium Silicate
100%
Atomic Scale
100%
Scale Model
100%
Model Interfaces
100%
Interfacial Layer
75%
Hafnon
50%
Thermal Stability
25%
Density Functional Theory
25%
Structural Features
25%
Poor Quality
25%
High Thermals
25%
Field-effect Transistors
25%
High-k Gate Dielectrics
25%
High-permittivity
25%
Abrupt Interface
25%
Geometry Optimization
25%
Oxidizing Conditions
25%
Relative Stability
25%
Molecular Dynamics
25%
Dynamic Optimization
25%
Si Substrate
25%
Molecular Geometry
25%
Suboxide
25%
Silicon Suboxide
25%
Minimum Thickness
25%
Semiconductor Processing
25%
Defective Interface
25%
Si Bridge
25%
Complementary Metal Oxide Semiconductor
25%
Material Science
Silicon
100%
Silicate
100%
Hafnium
100%
Density
33%
Thermal Stability
33%
Dielectric Material
33%
Oxidation Reaction
33%
Field Effect Transistor
33%
Permittivity
33%
Complementary Metal-Oxide-Semiconductor Device
33%
Engineering
Interfacial Layer
100%
Scale Model
100%
Defects
66%
Poor Quality
33%
Field-Effect Transistor
33%
Complementary Metal-Oxide-Semiconductor
33%
Geometry Optimization
33%
Si Substrate
33%
Relative Stability
33%
Resist Oxidation
33%
Gate Dielectric
33%
Physics
Scale Model
100%
Hafnium
100%
Density Functional Theory
33%
Molecular Dynamics
33%
Field Effect Transistor
33%
Dielectrics
33%
Permittivity
33%
Metal Oxide Semiconductor
33%
Chemical Engineering
Hafnium
100%
Oxide Semiconductors
33%