Keyphrases
Bumpless
100%
Wire Bonding Machine
100%
Phase Trajectory
100%
Data-based Tuning
100%
Predefined-time
100%
Axis Trajectory
100%
Coupling Stiffness
100%
Compliant Parallel Mechanism
50%
Coordinated Trajectory Tracking
50%
Special Perturbations
25%
Non-invertibility
25%
Noncommutative
25%
Motion Phases
25%
Point-to-point Movements
25%
Bumpless Transfer
25%
Nano Level
25%
System Coupling
25%
Velocity Estimation
25%
Revolute
25%
Compliant Positioning Stage
25%
Velocity Disturbance
25%
Nonlinear Stiffness System
25%
Positioning Stage
25%
Motion Disturbance
25%
Linear Sliding Mode Control
25%
Micro-nano Positioning
25%
Engineering
Bonding Wire
100%
Extended State Observer
100%
Sliding Mode Control
66%
Positioning Stage
66%
Degree of Freedom
33%
Initial Condition
33%
Position Signal
33%
Control System
33%
Root Mean Square Error
33%
Lyapunov Stability Analysis
33%
External Disturbance
33%
Performance Improvement
33%
Stiffness Model
33%
Delay Time
33%
Dynamic Performance
33%
Control Scheme
33%
Coupling System
33%
Circular Trajectory
33%
